Abstract: With the development of science and technology, people have put forward higher and higher requirements for the surface roughness and surface shape accuracy of optical components, and the surface defect detection technology of optical components has also received extensive attention. By briefly describing the types of surface defects, the harm caused by defects to the optical system is emphasized, and the current detection methods for optical component defects at home and abroad are analyzed and discussed, and the advantages and disadvantages of various methods are pointed out. The application of the technology in defect detection is introduced, and the problems that need to be solved in the future development of optical component surface defect detection technology are also discussed.

With the rapid development of modern industry, precision optical components have a wide range of applications in various industrial fields. As a carrier for realizing optical functions, optical components play a vital role in the development and use of various optical instruments. Therefore, in view of the scattering characteristics of the surface of optical components, how to better detect the surface defects of components is also proposed.

The detection process of optical components is very complicated and full of uncertainty. Optical components can be divided into a series of materials such as ordinary optical glass, neodymium glass, fused silica optical glass, calcium fluoride (CaF2) according to the composition material; Some are as large as a few meters or as small as one or two millimeters, and the difference can reach thousands of times; according to the shape of the optical components, it can be divided into flat plate, aspherical target mirror, spherical lens, cylindrical lens, corner prism, polarizer, glass ball etc. In order to meet the needs of various optical components in the above three aspects, measuring instruments, environments, equipment, and technologies must be various. Faced with such a wide variety of optical components with different functions and shapes, we need to explore the corresponding detection technology.

Therefore, this paper mainly reviews the related researches on the surface defect detection of optical components from the aspects of surface defects and surface scattering characteristics of optical components, as well as various research methods at home and abroad, and discusses the defect detection technology using machine vision and its future development. development trend.